Microwave Assisted Post-Oxidation Optical Nanodeposition Apparatus

MEPAD2600
This equipment is specially designed for the coating of precision optical thin film devices and optical element coating production. Each system unit and the overall structure can well meet the needs of optical thin film production process. It is suitable for the coating of various film systems such as anti-reflection film. It is equipped with a high-power microwave ion source system, a high-precision film thickness control system, excellent magnetic control, and a highly automated coating control system.
The effective coating area of the equipment is 10 square meters. Ultimate vacuum degree: better than 2 x10-6 Torr (with cold trap).
The overall equipment has high operating stability and can achieve a repeatability of ±3% and uniformity of ±3% on the basis of standard AR coating.
The vacuum system adopts a molecular pump system, which is an ideal coating equipment for high-precision optical and surface metallized films and reactive coatings.
Intelligent, automated, AF anti-fingerprint technology, excellent film performance, excellent stability and uniformity.