Integrated Magnetron Coating Machine

ZCK1900
Ultimate pressure: 5×10-4Pa, pumping speed: the pumping time from atmosphere to 5×10-3Pa is less than 20 minutes.
Equipped with molecular pump, matching set of mechanical pump and Roots pump group.
Equipped with bias power supply, medium frequency power supply, arc power supply, ion source power supply.
The pumping chamber is water-cooled and considered at the same time as the vacuum chamber, which is cost-effective and saves operating costs;
Professional design combines the design of the electric control cabinet wire duct, furnace body, pipeline, etc. in one frame, with compact layout and convenient hoisting and migration.
It has the advantages of high degree of automation, large load capacity, large production capacity and high stability.