ZK-820
The ZK-820 batch continuous magnetron coating unit has entered the field of microelectronic components. In cooperation with Chengdu University of Electronic Science and Technology, the preparation technology of new thin film resistor strain gauges has been developed and industrialized.
The first layered magnetron sputtering coating equipment technology! Core equipment, independently developed.
The continuous magnetron sputtering coating machine is mainly used for magnetron sputtering deposition of metal films on the surface of flexible substrates. It can be used to plate Ni, Cr, Cu, alloys and other metal materials on flexible substrates such as PI (polyimide), PET and other plastic-based flexible materials, and realize the continuous deposition of 3 layers of thin films with different process parameters on a single substrate in the same vacuum chamber. The film thickness covers the range of 50nm~5µm.
