Zk-820 Batch Continuous Magnetron Coating Unit, Entering the Field of Microelectronic Components

In 2023, the company will cooperate with Chengdu University of Electronic Science and Technology to develop the preparation technology and industrial application of new thin film resistance strain gauges.

The first layered magnetron sputtering coating equipment technology! Core equipment, independently developed. It is the first production technology applied in this field in China.

The continuous magnetron sputtering coating machine is mainly used for magnetron sputtering deposition of metal films on the surface of flexible substrates. It can be used to plate Ni, Cr, Cu, CuNi alloy and other metal materials on flexible substrates such as PI (polyimide), PET and other plastic-based flexible materials, and realize the continuous deposition of 3 layers of thin films with different process parameters on a single substrate in the same vacuum chamber. The film thickness covers the range of 50nm~54m.

The unit equipment has passed the acceptance of government departments and has been well received by customer experts.